JPH0213732U - - Google Patents
Info
- Publication number
- JPH0213732U JPH0213732U JP9070388U JP9070388U JPH0213732U JP H0213732 U JPH0213732 U JP H0213732U JP 9070388 U JP9070388 U JP 9070388U JP 9070388 U JP9070388 U JP 9070388U JP H0213732 U JPH0213732 U JP H0213732U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stage
- vacuum
- evaluating
- fixes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9070388U JPH0213732U (en]) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9070388U JPH0213732U (en]) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0213732U true JPH0213732U (en]) | 1990-01-29 |
Family
ID=31315217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9070388U Pending JPH0213732U (en]) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213732U (en]) |
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1988
- 1988-07-08 JP JP9070388U patent/JPH0213732U/ja active Pending